Technical Parameters
Secondary Electron Resolution: 0.8 nm (acceleration voltage 15 kV) (standard mode, not in any deceleration mode)
1.1 nm (acceleration voltage 1 kV) (deceleration mode)
Magnification: 20 to 1000k Acceleration Voltage: 20-1000k
Electronic Displacement: ±12μm (WD=8mm)
Aperture: 4-hole objective movable aperture system: built-in self-cleaning device (aperture 30, 50, 50, 100μm)
Detectors: Lower and Upper secondary electron detectors, Upper filtered backscatter detector
Signal Selection: Secondary electron image, Backscattered electron image, Mixed image
Rapid Sample Exchange System: 100mm diameter large sample exchange chamber, sample exchange time is 30 seconds
Vacuum Transfer System: Hitachi original vacuum transfer system
Energy Spectrometer: Bruker 60mm2 energy spectrometer
Application Range
The deceleration function of acceleration voltage has a series of advantages such as shorter wavelength, smaller aberrations, and higher resolution. It can reduce sample damage while obtaining low-voltage high-resolution images.
The SE/BSE signal reception function in proportion. The electron microscope is equipped with Lower and Upper secondary electron detectors, and a Upper filtered backscatter probe. By changing the voltage of the internal transformer electrode of the lens, the detector can capture secondary electrons and backscattered electrons, mix them in any proportion (100 levels), achieve optimal contrast observation, suppress charge and edge effects, and obtain the best contrast SEM image.
Detail
Detail
