Tianmu Lake Institute of Advanced Energy Storage Technologies Co., Ltd.2019 Powwed by:www.300.cn Changzhou 苏ICP备14056531号-1号
Ion Beam Cutting Polishing and Coating System
Model:
No.685
Manufacturers:
GATAN Corporation of the United States
About the device:
GATAN ion beam cutting and polishing coating system is a desktop wide beam xenon ion polishing and coating equipment. For the same sample, polishing and coating can be done in the same vacuum environment.
Technical parameters:
1. Ion source: ion gun two dominant rare earth magnet Sanning ion gun, high-performance no consumables, polishing angle of 10 degrees, each ion gun can be independently adjusted, ion beam energy 100 eV to 8.0 keV, ion beam density 10 mA/cm2 peak ion beam diameter can be adjusted by gas flow meter or discharge voltage;
2. Sample table: sample size: maximum diameter 32mm, maximum height 15mm, sample loading: for cross-sectional sample polishing using Ilion™ II patented sample bezel, secondary reprocessing position is precise, sample polishing and coating function: and flat polishing, cross-sectional polishing and sputtering coating function, target number: 2, Target switching: no need to destroy the vacuum, can directly switch sample rotation: 1 to 6 rpm adjustable, beam modulation: angle adjustable single-beam modulation or double-beam modulation;
3. Vacuum system: dry pump system 80 L/s turbo molecular pump with two stagediad pump, pressure: 5 x 10-6 torr basic pressure, 8 x 10-5 torr operating pressure, vacuum gauge cold cathode type for the main sample room;
4. User interface: 10-inch touch screen is simple to operate, and can fully control all parameters and distribution operation, the interface language provides Chinese, English and other options.
Features:
1. Two aggregate ion guns, ion guns without any consumables;
2. Multi-functional, ion beam plane polishing and cross-sectional cutting, high-precision coating and film thickness measurement;
3. Polishcoating coating in the same vacuum system, can be polished to complete the direct carbon plating research;
4. Polishing area . . . 10mm;
5. Fully automatic touch screen control, matching mode operation, high aerobic repeatability;
6. Liquid nitrogen cooling table is standard to remove the damage to the sample from the thermal effect.
Sample requirements:
Sample size: 32mm maximum diameter, maximum height 15mm
Application range:
For EBSD sample preparation;
Metal materials (alloys, coatings);
Petroleum geological rock minerals;
Photoelectric materials;
Chemical polymer materials.