Ion Beam Cutting Polishing and Coating System

Model:

No.685

Manufacturers:

GATAN Corporation of the United States

About the device:

GATAN ion beam cutting and polishing coating system is a desktop wide beam xenon ion polishing and coating equipment. For the same sample, polishing and coating can be done in the same vacuum environment.

Technical parameters:

1. Ion source: ion gun two dominant rare earth magnet Sanning ion gun, high-performance no consumables, polishing angle of 10 degrees, each ion gun can be independently adjusted, ion beam energy 100 eV to 8.0 keV, ion beam density 10 mA/cm2 peak ion beam diameter can be adjusted by gas flow meter or discharge voltage;

2. Sample table: sample size: maximum diameter 32mm, maximum height 15mm, sample loading: for cross-sectional sample polishing using Ilion™ II patented sample bezel, secondary reprocessing position is precise, sample polishing and coating function: and flat polishing, cross-sectional polishing and sputtering coating function, target number: 2, Target switching: no need to destroy the vacuum, can directly switch sample rotation: 1 to 6 rpm adjustable, beam modulation: angle adjustable single-beam modulation or double-beam modulation;

3. Vacuum system: dry pump system 80 L/s turbo molecular pump with two stagediad pump, pressure: 5 x 10-6 torr basic pressure, 8 x 10-5 torr operating pressure, vacuum gauge cold cathode type for the main sample room;

4. User interface: 10-inch touch screen is simple to operate, and can fully control all parameters and distribution operation, the interface language provides Chinese, English and other options. 

Features:

1. Two aggregate ion guns, ion guns without any consumables;

2. Multi-functional, ion beam plane polishing and cross-sectional cutting, high-precision coating and film thickness measurement;

3. Polishcoating coating in the same vacuum system, can be polished to complete the direct carbon plating research;

4. Polishing area . . . 10mm;

5. Fully automatic touch screen control, matching mode operation, high aerobic repeatability;

6. Liquid nitrogen cooling table is standard to remove the damage to the sample from the thermal effect.

Sample requirements:

Sample size: 32mm maximum diameter, maximum height 15mm

Application range:

For EBSD sample preparation;

Metal materials (alloys, coatings);

Petroleum geological rock minerals;

Photoelectric materials;

Chemical polymer materials.