Process Environment
Dew Point: -60℃
Dust: 100,000-grade
Equipment Capability Parameters
Liquid injection accuracy: ±1% * volume of injected liquid.
Time range for vacuum evacuation: adjustable from 10s to 30min.
Adjustable pressure range: 0-0.4Mpa.
Vacuum range: -99Kpa to -95Kpa.
Detail
Detail