天目湖先进储能技术研究院

Technical Specifications:

. Ion Source: Two Penning ion guns equipped with rare earth magnets, high-performance and maintenance-free. Polishing angle ±10°, each ion gun can be adjusted independently. Ion beam energy ranges from 100 eV to 8.0 keV. Peak ion beam current density is 10 mA/cm2. The diameter of the ion beam can be adjusted using a gas flow meter or discharge voltage.

. Vacuum System: Turbomolecular pump with a capacity of 80 L/s equipped with a two-stage diaphragm pump. Base pressure: 5 x 10-6 torr, working pressure: 8 x 10-5 torr. Cold cathode vacuum gauge for the main sample chamber. Solid-state vacuum gauge for the foreline mechanical pump. Sample airlock with Whisperlok patented technology, allowing sample loading/unloading without breaking the main chamber vacuum. Sample exchange time < 1 min.

Application Range:

• For EBSD sample preparation

• Cross-sectional sample preparation

• Metal materials (alloys, coatings)

• Petroleum geology rocks and minerals

• Optoelectronic materials

• Chemical and polymer materials

• New energy battery materials